Development of a Millimeter-Stroke Electrothermal Kirigami MEMS Actuator with Low Driving Power-Static and Dynamic Thermomechanical Characteristic of Film Bimorph-
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ژورنال
عنوان ژورنال: Netsu Bussei
سال: 2020
ISSN: 0913-946X,1881-414X
DOI: 10.2963/jjtp.34.109